Low Pressure Plasmas and Microstructuring Technology

Download or Read eBook Low Pressure Plasmas and Microstructuring Technology PDF written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle.
Low Pressure Plasmas and Microstructuring Technology
Author :
Publisher : Springer Science & Business Media
Total Pages : 743
Release :
ISBN-10 : 9783540858492
ISBN-13 : 3540858490
Rating : 4/5 (92 Downloads)

Book Synopsis Low Pressure Plasmas and Microstructuring Technology by : Gerhard Franz

Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].


Low Pressure Plasmas and Microstructuring Technology Related Books

Low Pressure Plasmas and Microstructuring Technology
Language: en
Pages: 743
Authors: Gerhard Franz
Categories: Technology & Engineering
Type: BOOK - Published: 2009-04-09 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one pl
Low Pressure Boilers Workbook
Language: en
Pages: 140
Authors: Frederick M. Steingress
Categories: Education
Type: BOOK - Published: 2008 - Publisher: Amer Technical Pub

DOWNLOAD EBOOK

The Workbook contains questions similar to those found on a typical boiler operator's licensing exam.
Low Pressure
Language: en
Pages: 401
Authors: Sandra Brown
Categories: Fiction
Type: BOOK - Published: 2012-09-18 - Publisher: Grand Central Publishing

DOWNLOAD EBOOK

When a tabloid exposes her personal life, a bestselling author reconnects with a man from her past to unearth the secrets behind her sister's murder. Bellamy Ly
Low-Pressure Synthetic Diamond
Language: en
Pages: 383
Authors: Bernhard Dischler
Categories: Science
Type: BOOK - Published: 2013-03-08 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

A comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.
Blood Pressure Down
Language: en
Pages: 354
Authors: Janet Bond Brill, PhD, RD, LDN
Categories: Health & Fitness
Type: BOOK - Published: 2013-05-07 - Publisher: Harmony

DOWNLOAD EBOOK

For the nearly 78 million Americans with hypertension, a safe, effective lifestyle plan—incorporating the DASH diet principles and much more—for lowering bl